Taiwan Semiconductor Manufacturing Seeks Patent for Low Warpage High Density Trench Capacitor

Published date08 April 2021
The patent application number is 17/104636. International Patent Classification codes are H01L 49/02 20060101 H01L049/02, H01L 27/01 20060101 H01L027/01, H01L 29/94 20060101 H01L029/94, H01L 29/66 20060101 H01L029/66, H01L 21/027 20060101 H01L021/027, H01L 21/306 20060101 H01L021/306, H01L 21/3105 20060101 H01L021/3105, H01L 21/311 20060101 H01L021/311, H01L 21/3205 20060101 H01L021/3205, H01L 21/321 20060101 H01L021/321, H01L 21/3213 20060101 H01L021/3213, H01L 21/764 20060101 H01L021/764, H01L 23/00 20060101 H01L023/00 and H01L 27/108 20060101 H01L027/108. Cooperative Patent Classification codes are H01L 2224/32225 20130101, H01L 28/92 20130101, H01L 28/91 20130101, H01L 27/016 20130101, H01L 2224/48091 20130101, H01L 23/562 20130101, H01L 2924/181 20130101, H01L 21/32055 20130101, H01L 28/87 20130101, H01L 21/31111 20130101, H01L 2924/19103 20130101, H01L 2224/32145 20130101, H01L 2224/73265 20130101, H01L 27/10829 20130101, H01L 2924/13091 20130101, H01L 2224/13101 20130101, H01L 21/32133 20130101, H01L 2224/2919 20130101, H01L 2224/48227 20130101, H01L 21/0274 20130101, H01L 2924/3511 20130101, H01L 2924/19011 20130101, H01L 2224/73204 20130101, H01L 2924/00014 20130101, H01L 29/66181 20130101, H01L 2924/14 20130101, H01L 2924/1304 20130101, H01L 29/945 20130101, H01L 2924/1305 20130101, H01L 21/3212 20130101, H01L 21/31053 20130101, H01L 21/30604...

To continue reading

Request your trial

VLEX uses login cookies to provide you with a better browsing experience. If you click on 'Accept' or continue browsing this site we consider that you accept our cookie policy. ACCEPT